Partners
ATT Systems
ATT Systems is a German leader in thermal test technology for the semiconductor industry. It has steadily grown into a trusted technology partner, specializing in advanced thermal solutions for wafer testing. Its modular hybrid technology combines hot and cold systems with air- and liquid-cooled chuck systems, configurable for each prober model and test requirement.
ATT Systems is committed to continuous improvement in quality, reliability and service across the entire customer experience. As ATT’s partner in Taiwan, WAYES provides consultation, integration and technical support for thermal chucks, cold upgrades and chiller solutions.
Applications & Solutions
Cold Upgrade –
• Cold Upgrade Solutions for various prober types – P8XL, P12XL, PrecioXL, UF2XXX, UF3XXX
• Onsite Sealing Upgrade within 7-10 working days
AddOn –
•Modular Stacks for various applications
•HV/HC (10KV/500A), LN, Plain, AddOn Technology Caro, warped substrates
Moveable Chiller –
• Chiller can be shared between several “cold ready” probers
• Self sealing couplings and automatic chiller detection
Dry Air Control –
• Advanced dry air control to purge with two individual media (e.g. CDA, N2)
• Copper pad protection against oxidation
• Adaptive Dew Point control to reduce CDA consumption
High Power/Accuracy –
• Low Thermal Resistance Chuck for High Accuracy Applications
• Absolute Uniformities of +/-0.2°C on 300mm wafers
• Heat dissipation of 2000W at -40°C
100 %Quality
100 %Reliability
100 %Service